SAM® SFC-1580/1680F SERIES

SFC-1580/1680 series is the high temperature version of compact digital Mass Flow Controllers.

A separate control unit with heat proofed connection, a lower sensor heating temperature, and high temperature piezo-stack are used. A simple valve structure, which does not compress and expand gas, prevents re-condensation.

FEATURES

• Higher operating temperature 150 °C
• Built-in structure to prevent recondensation
• Fast response < 1 sec flow settling time
• Metal seals
• Flow 10 SCCM - 30 SLM (14 models available)
• Leak integrity < 1x10^-11 Pa m³/s He

HIGHER OPERATING TEMPERATURES

BENEFITS

• Application into high temperature processing
• Easy integration - standard connectors and dimensions