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LOW FLOW RANGE - DUAL STAGE - EXTERNAL GAS PURGING SYSTEM

MANIFOLD FOR PURE GAS SUPPLY SYSTEMS, Two sources, Manual change over system, External gas purging system The manifold used in gas supply systems for pure, inert, flammable, oxidizing, corrosive, toxic gases and gas mixtures. Maximum gas purity is 6.0.  TECHNICAL SPECIFICATION Switching between two sources by the manual valve actuation Regulator and Valves - Hastelloy/Elgiloy diaphragm tighting system to atmosphere Compact design Exc

LOW FLOW RANGE - TWO PORT VERSION

VALVE FOR USE IN PURE GAS SUPPLY SYSTEMS, Diaphragm shut-off valve 2-port metal diaphragm shut-off valve is used in supply systems for pure, inert, flammable, oxidizing, corrosive, toxic gases and gas mixtures. Maximum gas purity is 6.0. SPECIAL FEATURES Elgiloy diaphragm tighting system to atmosphere Compact design Designed and approved in accordance with relevant sections of EN ISO 10297:2015 O2 ignition test regarding EN ISO 10297

LOW FLOW RANGE - FOUR PORT VERSION - ONE INLET PORT - THREE OUTLET PORTS

VALVE FOR USE IN PURE GAS SUPPLY SYSTEMS, Diaphragm shut-off valve 4-port metal diaphragm shut-off valve is used in supply systems for pure, inert, flammable, oxidizing gases and gas mixtures. This stainless steel version valve is also usable for corrosive and toxic gases and gas mixtures. Maximum gas purity is 6.0. SPECIAL FEATURES Hastelloy/Elgiloy diaphragm tighting system to atmosphere Compact design Designed and approved in accor

LOW FLOW RANGE - FOUR PORT VERSION - THREE INLET PORTS - ONE OUTLET PORT

VALVE FOR USE IN PURE GAS SUPPLY SYSTEMS, Diaphragm shut-off valve 4-port metal diaphragm shut-off valve is used in supply systems for pure, inert, flammable, oxidizing gases and gas mixtures. This stainless steel version valve is also usable for corrosive and toxic gases and gas mixtures. Maximum gas purity is 6.0. SPECIAL FEATURES Hastelloy/Elgiloy diaphragm tighting system to atmosphere Compact design Designed and approved in

MIDDLE FLOW RANGE - TWO PORT VERSION - NPT1/2" PORTING

DIAPHRAGM SHUT-OFF VALVE, for piping systems with outside diameter up to 25 mm/1" Suitable for high purity, inert, flammable and oxidizing gases, max. working pressure up to 40 bar/600psi. SPECIAL FEATURES Higher flow rates Permanently technical tightness to outside because of Hastelloy diaphragm Approved in accordance with relevant sections of ISO 10297 Usable for Oxygen applications because of approved seat material Suitable in piping

LOW FLOW RANGE - TWO PORT VERSION

VALVE FOR USE IN PURE GAS SUPPLY SYSTEMS, Diaphragm regulating valve 2-port metal diaphragm regulating valve is used in supply systems for pure, inert, flammable, oxidizing, corrosive, toxic gases and gas mixtures. Maximum gas purity is 6.0. SPECIAL FEATURES Elgiloy diaphragm tighting system to atmosphere Compact design Designed and approved in accordance with relevant sections of EN ISO 10297:2015 Electrostatic chargeability test Fulf

LOW FLOW RANGE - TWO PORT VERSION

VALVE FOR USE IN PURE GAS SUPPLY SYSTEMS, Diaphragm regulating valve with shut-off function 2-port metal diaphragm regulating valve with shut off function is used in supply systems for pure, inert, flammable, oxidizing, corrosive, toxic gases and gas mixtures. Maximum gas purity is 6.0. SPECIAL FEATURES Elgiloy diaphragm tighting system to atmosphere Compact design Designed and approved in accordance with relevant sections of EN ISO 10297:

LOW FLOW RANGE - SINGLE STAGE - FOUR PORT VERSION

LINE REGULATOR FOR USE IN PURE GAS SUPPLY SYSTEMS, High pressure range 4-port single stage line regulator is used in gas supply systems for pure, inert, flammable, oxidizing, corrosive and/or toxic gases and gas mixtures. Maximum gas purity is 6.0. SPECIAL FEATURES Hastelloy diaphragm tighting system to atmosphere Compact design Excellent pressure adjustment Designed and approved regarding ISO 7291 (including O2 ignition test for brass ch

PREHEATER

Fitted between the cylinder and the regulator, preventing freezing inside the regulator.

SAM® 1480/2480 G4 SERIES

G4 models is the most advanced MFC meeting or exceeding the demand of the actual and also the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Pressure-insensitive operation Valve shut-off function In-line integrated flow verification system Self celibration function LCD display (temp, pressure, set, output) easifies control routines BENEFITS Great inlet pressure change insensitivity Allows on

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