SAM® SFC-1580/1680F SERIES
code groupe: 4960SFC-1580/1680 series is the high temperature version of compact digital Mass Flow Controllers.
A separate control unit with heat proofed connection, a lower sensor heating temperature, and high temperature piezo-stack are used. A simple valve structure, which does not compress and expand gas, prevents re-condensation.
FEATURES
- Higher operating temperature 150 °C
- Built-in structure to prevent recondensation
- Fast response < 1 sec flow settling time
- Metal seals
- Flow 10 SCCM - 30 SLM (14 models available)
- Leak integrity < 1x10-11 Pa m3/s He
HIGHER OPERATING TEMPERATURES
BENEFITS
- Application into high temperature processing
- Easy integration - standard connectors and dimensions
Télechargements
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Téléchargements additionnels pour ce produit
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